{
"Summary": {
  "Slices": 31,
  "InitialPositionList": [
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -5028.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -5028.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -5028.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -5028.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -5028.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4749.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4749.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4749.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4749.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4749.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4471
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4471
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4471
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4471
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4471
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4192.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4192.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4192.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4192.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4192.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -3913.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -3913.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -3913.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -3913.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -3913.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          933.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          933.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          933.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          933.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          933.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1212.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1212.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1212.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1212.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1212.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1491
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1491
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1491
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1491
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1491
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1769.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1769.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1769.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1769.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1769.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          2048.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          2048.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          2048.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          2048.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          2048.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19329.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19329.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19329.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19329.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19329.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19608.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19608.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19608.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19608.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19608.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19887
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19887
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19887
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19887
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19887
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20165.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20165.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20165.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20165.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20165.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20444.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20444.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20444.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20444.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20444.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26393.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26393.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26393.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26393.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26393.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26672.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26672.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26672.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26672.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26672.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26951
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26951
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26951
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26951
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26951
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27229.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27229.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27229.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27229.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27229.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27508.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27508.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27508.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27508.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27508.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          27725.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          27725.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          27725.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          27725.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          27725.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28004.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28004.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28004.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28004.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28004.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28283
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28283
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28283
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28283
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28283
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28561.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28561.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28561.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28561.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28561.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28840.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28840.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28840.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28840.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28840.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21470.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21470.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21470.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21470.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21470.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21749.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21749.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21749.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21749.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21749.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22028
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22028
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22028
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22028
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22028
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22306.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22306.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22306.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22306.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22306.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22585.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22585.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22585.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22585.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22585.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3179.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3179.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3179.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3179.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3179.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3458.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3458.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3458.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3458.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3458.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3737
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3737
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3737
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3737
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3737
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4015.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4015.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4015.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4015.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4015.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4294.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4294.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4294.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4294.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4294.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -2228.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -2228.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -2228.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -2228.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -2228.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1949.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1949.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1949.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1949.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1949.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1671
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1671
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1671
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1671
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1671
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1392.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1392.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1392.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1392.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1392.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1113.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1113.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1113.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1113.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1113.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5758.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5479.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5201
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5201
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5201
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5201
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5201
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4922.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4643.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          95.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          95.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          95.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          95.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          95.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          374.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          374.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          374.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          374.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          374.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          653
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          653
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          653
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          653
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          653
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          931.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          931.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          931.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          931.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          931.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          1210.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          1210.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          1210.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          1210.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          1210.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19586.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19586.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19586.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19586.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19586.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19865.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19865.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19865.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19865.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19865.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20144
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20144
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20144
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20144
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20144
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20422.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20422.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20422.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20422.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20422.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20701.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20701.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20701.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20701.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20701.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24663.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24663.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24663.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24663.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24663.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24942.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24942.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24942.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24942.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24942.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25221
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25221
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25221
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25221
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25221
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25499.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25499.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25499.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25499.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25499.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25778.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25778.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25778.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25778.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25778.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          27951.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          27951.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          27951.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          27951.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          27951.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28230.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28230.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28230.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28230.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28230.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28509
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28509
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28509
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28509
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28509
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28787.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28787.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28787.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28787.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28787.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          29066.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          29066.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          29066.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          29066.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          29066.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22161.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22161.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22161.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22161.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22161.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22440.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22440.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22440.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22440.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22440.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22719
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22719
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22719
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22719
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22719
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22997.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22997.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22997.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22997.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22997.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          23276.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          23276.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          23276.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          23276.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          23276.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4146.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4146.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4146.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4146.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4146.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4425.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4425.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4425.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4425.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4425.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4704
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4704
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4704
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4704
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4704
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4982.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4982.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4982.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4982.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4982.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          5261.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          5261.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          5261.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          5261.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          5261.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1982.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1982.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1982.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1982.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1982.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1703.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1703.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1703.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1703.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1703.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1425
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1425
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1425
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1425
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1425
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1146.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1146.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1146.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1146.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1146.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -867.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -867.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -867.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -867.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -867.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_004",
      "GridRowIndex": 4
    }
  ],
  "Interval_ms": 0,
  "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
  "UserName": "Nikon",
  "Depth": 2,
  "PixelType": "GRAY16",
  "Time": "2019-12-16 05:31:50 -0500",
  "Date": "2019-12-16",
  "z-step_um": 1,
  "MetadataVersion": 10,
  "PositionIndex": 157,
  "SlicesFirst": true,
  "ChContrastMin": [
    0,
    0,
    0,
    0,
    0
  ],
  "Width": 2048,
  "PixelAspect": 1,
  "MicroManagerVersion": "1.4.23 20190321",
  "ROI": [
    0,
    0,
    2048,
    2048
  ],
  "ChNames": [
    "Il-G",
    "Il-T",
    "Il-A",
    "Il-C",
    "P-DIC"
  ],
  "IJType": 1,
  "GridRow": 0,
  "Comment": "",
  "Height": 2048,
  "GridColumn": 0,
  "Prefix": "geneseq_1",
  "PixelSize_um": 0.16,
  "Frames": 1,
  "CameraTimeout": 20000,
  "BitDepth": 16,
  "KeepShutterOpenChannels": false,
  "Source": "Micro-Manager",
  "Channels": 5,
  "ComputerName": "ZadorConfocal1",
  "CustomIntervals_ms": [],
  "KeepShutterOpenSlices": false,
  "ChColors": [
    -13369345,
    -256,
    -52225,
    -1,
    -1
  ],
  "TimeFirst": false,
  "ChContrastMax": [
    65536,
    65536,
    65536,
    65536,
    65536
  ],
  "Positions": 400,
  "Directory": "F:\\20191216M1cdhs"
},
"FrameKey-0-0-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2bd826bb-b0dc-4305-9ccb-3aa9ad27aa95",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7766942,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0fe931ba-2123-4317-84d3-b0fa84b7c071",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7767220,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2f00c7f9-6735-482c-b5c4-c1c8f28f5f44",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7767496,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bca3718c-3902-4bc6-8c34-fa596074c65e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7767772,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "163e8620-fa6c-43cb-aac6-79af7bad7518",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7768050,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cb6d7d16-4ea6-4e48-a74c-e1084feb60bd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7768329,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "97d870c4-e251-49a5-a5e8-76f181934a28",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7768610,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8c5babb7-e6a1-4540-bceb-6b904625e2b4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7768888,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "64d1df05-ff36-498b-9b82-d898c34b83fb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7769164,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "25f55c61-05f9-4b55-97c0-66828b7d0f6f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7769442,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73cb1014-cc3b-4cb0-be7a-c9dfb01444db",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7769716,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "808b243f-29b1-477c-843b-4f18d46b1bbf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7769993,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7ebae681-0247-4b41-a50e-2f42adaba67d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7770269,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "efc7521e-ac1c-47ea-8a57-a72d0403d627",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7770545,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2a4acaf-f55b-4998-9913-3af0a3321463",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7770819,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ab820892-d0f8-40de-b2fd-8fb3972816be",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7771103,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d22f205a-3269-4069-a777-4e5a5ce2fa47",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7771380,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "918608bf-0704-431b-8077-6e6d4493b2ef",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7771658,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b9484337-8dc1-4b0e-885f-6ba98ef219a3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7771935,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3d52d71e-eb9b-4c0e-b329-04571861796e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7772209,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f45babb3-7080-4318-8c18-5943e8549008",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7772485,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0cdd5d80-a72f-4818-ab16-f814ae951663",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7772766,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "53897bc2-fd2f-421f-92a7-0c1619535a5b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7773044,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6eaa48e0-c128-4f6b-89e0-1b8f5397e344",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7773319,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "05390703-9a5f-4fcc-a72f-3722a8fe4b0e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7773594,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f57da761-c048-40d2-a4c4-985f7be549db",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7773879,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "29f7acfc-0a66-4c15-8344-0e70f9aa5347",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7774156,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "61275008-56f8-401d-9f3e-ad0df3468eed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7774431,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e42d4641-1e52-4abb-9a01-b35e1863ca68",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7774725,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d51e7772-a218-4377-bc22-4d5dae39022a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7775002,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8e7cd2e1-5cf6-471c-83de-b178501f47fb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7775277,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1fb32618-05ca-4b2b-a831-496f47ab7d5f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7776215,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "96adabcd-d38b-4d30-8234-13caf5c6354b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7776395,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d3201ee1-4069-40a5-aacc-6635c49bf29a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7776561,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e2aaece8-0459-4985-a23c-889decba9508",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7776727,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2ee0da2-874f-44f8-aadb-77bb1739386e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7776893,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:31:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "64c65dab-6d24-4663-8dd1-4ce0e3b544e6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777071,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ef66fb7d-ea5e-4ca9-b5eb-6eaa1d2541bc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777237,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2deac0a6-c669-4e27-9047-526616d591ad",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777403,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "184b21e7-0e15-4350-b595-0c18153f9ab2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777571,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e83e6bb8-e4b4-4408-9968-4b6e69f53897",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777746,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "39ce3180-1dcc-4094-83fe-2b8ff21b5541",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7777911,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "008bcd1e-5b58-4e72-8ed6-a99f8f4cfaca",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778079,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "92bff33c-f386-472a-8663-140cfc8c3ea2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778245,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "52012965-c7a6-4173-9f92-ebc93480ad07",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778424,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "de94dea7-46a3-4be4-960a-d35b343fa7b3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778589,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fdfe8387-4f15-436b-ae2d-746762fbb761",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778755,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "23318b8b-e7de-4818-8f72-b2ad11e79da9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7778920,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "909619d9-ba28-40d3-90bc-4464524570e0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779094,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ed4446c2-38cd-4dd1-aa8f-98b86264807e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779260,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4fc36357-fde4-4c6a-b520-a77cfcb7ba66",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779425,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "520b219c-fbf0-44d7-9aa6-681d65ce3e2f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779591,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7861fba4-372f-488e-a54d-24b06913bfc7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779758,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5398745e-5777-407e-9478-7a0a1dff289c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7779923,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3f579ddb-c380-47aa-952d-45292b78bf5a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780088,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fe650ea9-16c3-4300-b83c-dfe2f80b2932",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780256,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e268aec1-3826-44cd-9655-f1d83b479efd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780422,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f2192f7b-4a84-4a76-b5f2-a287490c1ea7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780590,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bc6b2e9f-f3f9-4cc6-93d4-d69e51aa5b9f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780758,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "92b21071-6dd9-42c7-b02c-b53696156e67",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7780923,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0ad4ee0f-55e3-49be-b6b8-9fe00b2de169",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7781087,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "48dbc316-aba7-4eba-8922-924b4ce5c129",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7781265,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "404a3081-9c81-4dac-a261-d4dba75c9cf7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7782234,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "937749a4-8cda-43c2-b9a6-61724e0b54de",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7782500,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "051426f0-f444-45bc-944b-711c14d72519",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7782766,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "62f6334b-ed85-4222-af9e-3d51436df71f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7783048,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fea929f8-0368-42d6-9cb2-2772b2e674b3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7783315,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6243148c-79ab-4836-9daf-08fb420ef2c4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7783585,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dd23d3bd-d9fb-4480-8b1b-c933dfdebc94",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7783852,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "56cd258c-e838-4aac-967c-2d754449332b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7784128,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "44c59e60-ea66-4c78-bc97-54c40436ab16",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7784394,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0988e802-c7f7-4594-aa88-c64016461250",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7784660,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5ea6c565-7048-413f-900b-3e4fa6a6c254",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7784937,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0039e3c0-bff9-4cc9-aa95-48db708a31a3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7785202,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8b76620e-a204-433e-9390-460de8344df4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7785466,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4d0386a4-7fc1-441f-95a1-2d7718b5852b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7785732,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "834a6c98-1636-4ddb-b222-8337896e47ab",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7785999,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "74613b21-49a4-4f9b-bace-d37e93af4154",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7786269,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b97bf260-1350-48ec-a879-445a4ab3bc12",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7786547,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d819b485-12ff-40c6-adc0-aa24562e1d37",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7786811,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "50101edb-606c-4ee1-9fa9-5d388053355a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7787077,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "90d225bc-8042-4846-b573-cda06694b9d0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7787344,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b536d666-8d60-4b79-b4ca-cf8c77a4d57c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7787615,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea0f088a-0ffd-4d42-82c8-5184a71b8bbe",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7787887,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0ace7939-d651-4537-8ac6-c6c016b6fc14",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7788155,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "441baaa6-697b-48ae-852d-8a0da78ca7a0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7788421,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b59dac0f-b277-42c4-8e61-3bdd8c4aba70",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7788685,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "68b36d41-c5fe-4597-9f32-86d72a1ef98f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7788952,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9c60f5c0-e9de-4d6e-b433-0fc195034ef0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7789216,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e8a18657-4909-48d6-9a5f-e185a6ad3c28",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7789489,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "741e6f95-27cc-4815-b28a-aa03fa56e16b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7789755,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9d7d765c-60b4-4474-92d4-1184555cb644",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7790021,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cfb1dba9-7c30-40d4-8eef-244101908a5a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7790288,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "232217ce-8086-4ed0-b630-95abbc5ebf66",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7790910,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5ebdd880-28a9-4fb2-aacc-59cea3de0004",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7791246,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e20cc0a2-8d18-44b1-b541-24a5f5711094",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7791590,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "79bd8510-c8da-4cb4-b6d7-8b1f7f7becc2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7791928,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73dd1972-d174-4014-9fbe-edefe733c8f8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7792271,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ee23dc63-e217-42f9-959a-253c993066bb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7792616,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c0f12083-7f33-4b79-95fa-d2c56195668d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7792952,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4245a854-f4a1-45b6-9c6e-f4a79a027d4f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7793287,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dc97e95c-52a4-4731-867a-9332da152186",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7793624,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bfc301e4-0b15-4012-94d7-f7ad49eaf992",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7793959,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "65a94e22-d655-4cbe-b539-ea41760ec84c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7794294,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e82dca0e-728c-4f0b-b114-bd689fc11bf9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7794629,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5ddade1f-58e5-4ad1-af8c-7df728d96b16",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7794966,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "593c0b17-bfaa-4996-838d-42d7a5977511",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7795302,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "40f2f8d1-de25-45dd-8d33-9df8a9308eb6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7795638,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2c0d145-6676-40b1-99e2-bb2a67746d70",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7795974,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7ab6877e-c4f8-4f15-a03a-e3fa4fdf09f7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7796310,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5397df4a-e0a8-4a2b-818d-41103d7b41d8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7796645,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f962bd85-fcf1-4955-bdb7-d1bfcf18f9f1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7796981,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e4fa7bae-bf6d-4592-8579-d0f6b648f363",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7797326,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a747e758-8148-495e-8d15-f83517186030",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7797663,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7a00686a-0b1f-4001-ad02-e1bea785fd43",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7798006,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b11d48b2-2998-41c4-9503-faa2f617f968",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7798357,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "82e02eb3-cbc3-407e-8a88-10b69564e1c5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7798694,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fdf05c40-3dfe-4ac2-acb4-81921a021bfd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7799031,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "17aaa140-ba3e-4c3e-b444-20d915499c4b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7799391,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1cc1a133-8a9b-49a8-97b7-3f7c366e5425",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7799727,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4515adde-337c-4f0f-8873-a5ffc072c185",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7800062,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "207e6538-9b5e-41e5-bcd3-2d7ba063aec9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7800399,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f041b85f-5f5d-4011-ab20-de3a688bd76d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7800736,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "274b236f-1e7c-4c11-88ec-8afbcc314258",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7801074,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4e3a7426-e4fd-46e3-b752-5d8af6466fc7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7802179,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "438045aa-9129-4f64-ae94-a08877b04a8e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7802627,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "309059e5-c7b9-4277-831f-333474429076",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7803062,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "587a78e3-8a7f-4eca-97c0-c1ee5cd86b50",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7803493,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ccd07501-2750-4c23-a018-a8f6b2994b1f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7803940,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "43d05c75-0dd2-4a5b-a662-e8dad2d515df",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7804389,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4de549ed-a68f-404b-815a-2de937c2a7c0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7804836,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "91290a70-12ad-4a2b-9c30-60e010fc77b9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7805268,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "71e39daa-49ee-4ea2-bbe4-3fde47bb9b7c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7805714,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1f89710f-f81b-4065-a3bf-f71e3dafea5c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7806151,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "df2f92b4-e45a-4904-aa2c-356bd8505f0f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7806595,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8bfe8a92-e017-4216-b96f-1218c28b4b0b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7807010,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "87b343e0-9c65-4f9a-a047-9b742b380c28",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7807442,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "854dfd66-130d-4e76-8943-df3b617c0b16",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7807874,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fdc1e3aa-2775-4ff8-a374-17de7b999385",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7808291,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5729cdb9-98ad-4e31-8a3d-c809dbb4e7dd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7808740,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b6035848-5b3d-4989-ab58-c32b8a9c956c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7809155,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c8a64120-7698-4e16-aa1a-208a00034d0b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7809586,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b59866c9-b5ea-4f10-bc48-a0ef524f307f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7810018,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8fb3606b-5a12-4a0d-865b-a62acd8aca77",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7810482,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d8f16a71-693d-433e-bfb5-5e83872dca9e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7810913,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7863ce97-a347-48ae-a097-49bdca147882",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7811346,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bf9b7f66-7c70-4bcc-8bad-783ca6d4af5c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7811761,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "77cfba52-9889-43f5-8f94-38583494b2b0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7812211,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "248b46b9-47b4-40ec-b3f3-9223d48ad319",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7812658,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "27ca0534-609f-4035-8719-5c59a0c35841",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7813073,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bc073531-d1c8-4231-8296-1f502533577f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7813489,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "27feaf12-770f-4627-81ac-e5f7b7b4fb11",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7813904,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2cc523f1-02e8-468b-b6d3-b0d1ec4fa346",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7814336,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d112e144-2ad2-4e22-a825-8d9db53484fa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7814777,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3a8014fa-ad78-4e99-92b0-f968e4f5d824",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 157,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:31:50 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 157,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 7815249,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos6_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 65353,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:32:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 3458.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
}
}